Installation
5. Inspect the cryopump. If it is damaged, contact the nearest SCAI Service Center and notify
the delivering carrier.
6. All components in the gas system were cleaned and charged with helium gas at the factory.
Allow the compressor to reach room temperature. Read the pressure gauge(s) on the
compressor before connecting it into the system to determine if leaks have occurred which
may require leak checking, charging or gas cleanup.
Cryopump Lifting Instructions
PREVENT EQUIPMENT DAMAGE. Always remove heater blanket before
attempting to lift or move the cryopump.
PREVENT EQUIPMENT DAMAGE. DO NOT lift or move the cryopump using
the purge or rough valve and their piping, the relief valve assembly, the
temperature sensor connector, or the gas line connectors. See Figure 5.
Figure 5 Restricted Areas When Lifting Cryopump
1. Using properly rated commercial equipment, lift or move the cryopump as shown in Figure 6.
Be sure the cryopump is held in a balanced and stable position. Follow all applicable safety
procedures for overhead material transport.
Lift Here
Lift Here
Lift Here
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