INSTALLATION
Introduction
Install the Compressor, the Marathon
®
CP-8 Cryopump and the Gas Lines according to the
following procedures.
To prevent contaminating the components or the system, it is important to follow the procedures
in this manual step by step.
Do not begin to install the components if 99.995% pure helium gas is not
available. See Refrigerant Quality in Specifications.
Unpacking, Inspection and Pressure Check
DO NOT TIP THE COMPRESSOR greater than 5 degrees to avoid flowing oil
into unwanted places and causing a nuisance shutdown.
AVOID CONTAMINATION. When handling any vacuum surfaces, wear clean,
lint-free gloves. If the surfaces of the cryopanels become fingerprinted during
unpacking or handling, clean them with a solvent recommended for oil and
grease removal in high-vacuum service.
PREVENT EQUIPMENT DAMAGE. Do not use solvent on painted surfaces.
1. Upon delivery, inspect all shipping containers for damage.
1.1 If there is any evidence of external damage to any of the containers, be sure the
carrier’s driver sees the damage. Note it on the shipping documents and have the
driver acknowledge it by his initials on the delivery receipt.
1.2 Remove all components from their shipping containers and inspect them for
damage. If there was external damage to the compressor, remove its covers and
check for internal damage. Notify the carrier immediately and take photographs of
the damage to document your claim to the carrier. Keep the damaged shipping
container.
1.3 If there was external damage to any of the other shipping containers, remove the
contents and inspect all items for damage. Notify the carrier immediately and take
photographs of the damage to document your claim to the carrier. Keep the
damaged shipping container.
Retain the shipping containers if reusable for returning the cryopump to the
factory if reconditioning is required. If internal damage is suspected, retain the
shipping container for proof to the carrier.
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