INTRODUCTION
Cryopumps
SCAI Cryopumps produce clean, fast vacuum for high-vacuum applications. The cryopump
does not contribute any contamination to the vacuum chamber because it functions by capturing
gases, and no moving parts or lubricants are exposed to the vacuum.
Figure 1 shows the major components of typical cryopump systems:
• helium compressor
• cryopump(s)
• gas lines
• cold head cable(s)
• optional gas manifold for connecting multiple cryopumps to the compressor.
The Marathon
®
CP-8 Cryopump uses a model CH-204S Cold Head. Both are designed to
metric standards.
The information in this manual pertains only to the Marathon
®
CP-8 Cryopump System.
Pressures are stated as gauge, not absolute. Psig is pounds per square inch gauge and
kPa is Kilopascals gauge.
kPa = 6.895 Psig
Symbols on the equipment and descriptions:
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