Sumitomo Marathon CP-8 - Page 4

TABLE OF CONTENTS
(continued)
ii
Page
ACCESSORIES ............................................................................................................ 27
Installation ......................................................................................................... 27
Pumpout/Nitrogen Purge Adapter ...................................................................... 28
Silicon Diode or Hydrogen Vapor Bulb Temperature Sensor ............................. 28
OPERATION ................................................................................................................ 29
Prestart Check ................................................................................................... 29
Startup............................................................................................................... 30
Cold Head Orifice Adjustment ........................................................................... 32
Crossover Pressure Determination .................................................................... 33
Regeneration ..................................................................................................... 33
Regeneration: Warm-Up Phase .................................................................... 33
Regeneration: Purge Phase ......................................................................... 34
Regeneration: Evacuation Phase ................................................................. 35
Regeneration: Cooldown Phase ................................................................... 35
Vacuum Baking ................................................................................................. 35
Restarting after a Power Failure ........................................................................ 36
System Shutdown ............................................................................................. 36
Shutdown: One Cryopump in a Multiple Cryopump System ............................... 37
MAINTENANCE ........................................................................................................... 39
Cryopump Handling and Shipping ..................................................................... 39
Compressor Adsorber Replacement .................................................................. 41
Remove the Cryopump from the Vacuum Chamber .......................................... 41
Disconnect the Gas Lines .................................................................................. 42
Cryopanel Maintenance ..................................................................................... 43
Disassemble and Clean the Cryopanels ....................................................... 44
Reassemble the Cryopanels ......................................................................... 44
Clean the Relief Valve ....................................................................................... 45
Clean the Relief Valve’s Filter Screen ............................................................... 45
Rupture Disc...................................................................................................... 45
Standard Silicon Diode ...................................................................................... 46
Functional Check .......................................................................................... 46
Optional Dual Silicon Diode used with a Marathon
®
Cryopump Controller
(MCC) ........................................................................................................... 46
Functional Check of the Dual Silicon Diode .................................................. 47
Hydrogen Vapor Bulb ........................................................................................ 47
Cold Head Maintenance .................................................................................... 48
Cold Head Removal from the Cryopump ...................................................... 48
Cold Head Installation into the Cryopump ..................................................... 48
Charging and Venting ........................................................................................ 49
Charging Procedure ..................................................................................... 49
Venting Procedure to Adjust the Equalization Pressure ................................ 49
Gas Cleanup ..................................................................................................... 50
Gas Cleanup of the Gas Lines ...................................................................... 50
Gas Cleanup of the Cold Head ..................................................................... 50
Gas Cleanup of the Compressor .................................................................. 51
Leak Check the Refrigeration System ............................................................... 51
Leak Repair ....................................................................................................... 53