Sumitomo Marathon CP-8 - Page 5

TABLE OF CONTENTS
(continued)
iii
Page
TROUBLESHOOTING .................................................................................................. 55
Troubleshooting Guide ...................................................................................... 55
PARTS ......................................................................................................................... 63
Ordering ............................................................................................................ 63
Parts Identification and Numbers ....................................................................... 63
ILLUSTRATIONS LIST
Figure 1 Typical Cryopump Systems ........................................................................... 6
Figure 2 Equilibrium Vapor Pressure vs. Temperature ................................................ 7
Figure 3 Parts Identification and Stages of Freezing during Cryopumping ................... 9
Figure 4 Typical Adapter Fitting ................................................................................. 13
Figure 5 Restricted Areas When Lifting Cryopump .................................................... 17
Figure 6 Lifting the Cryopump with Commercial Lifting Equipment ............................ 18
Figure 7 Prepare Sensor Cable ................................................................................. 20
Figure 8 Cryopump Mounting .................................................................................... 21
Figure 9 Attach Identification Label ........................................................................... 22
Figure 10 Connect Gas Line to Compressor or Cryopump ........................................ 23
Figure 11a Relief Valve Vent Connection Detail .......................................................... 25
Figure 11b Vent Adapter (Optional) ............................................................................. 26
Figure 12 Evacuate the Cryopump Vacuum Enclosure ............................................... 31
Figure 13 Evacuate the Vacuum Chamber and Cool Down the Cryopump .................. 31
Figure 14 Steady State Cryopumping .......................................................................... 32
Figure 15 Warm-Up the Cryopump .............................................................................. 34
Figure 16 Break the Gas Line Connection from the Cold Head ................................... 42
Figure 17 Disconnect the Gas Line from the Cold Head .............................................. 42
Figure 18 Check the Standard Silicon Diode ............................................................... 46
Figure 19 Check the Dual Silicon Diodes .................................................................... 47
Figure 20 Possible Points of Gas Leaks ...................................................................... 53
SJM P/N 266810A