Troubleshooting
Cryopump suddenly warms
up. (continued)
Power interruption. Regenerate the cryopump.
Silicon diode is inoperative. Refer to Silicon Diode in the
Maintenance section of this
manual.
Cold head does not start or
starts and stops
intermittently.
Cold head or compressor is
inoperative.
Refer to the Troubleshooting
Guide in the compressor
manual.
Open circuit in the cold head
cable.
Disconnect the cable. Check
each conductor for continuity.
Replace the cable if necessary.
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