TSI Instruments 9310 - Page 81

A-1
APPENDIX A
Specifications
All specifications meet or exceed ISO 21501-4 and JIS B9921 and are
subject to change without notice.
Specification Description
Size Range 9310/9350: 0.3 to 25 μm
9510/9550/9500: 0.5 to 25 μm
Channel Sizes
(additional channel
sizes available)
9310-02: 0.3, 0.5, 1.0, 3.0, 5.0, 10.0 μm
9350-02: 0.3, 0.5, 1.0, 2.0, 3.0, 5.0 μm
9350-03: 0.3, 0.5, 1.0, 3.0, 5.0, 10.0 μm
9510-02: 0.5, 0.7, 1.0, 3.0, 5.0, 10.0 μm
9550-02: 0.5, 0.7, 1.0, 3.0, 5.0, 10.0 μm
9500-01: 0.5, 0.7, 1.0, 3.0, 5.0, 10.0 μm
Counting Efficiency
9310/9350: 50% @ 0.3 μm; 100% for particles
>0.45 μm (per JIS and ISO 21501-4)
1
9510/9550/9500:
50% @ 0.5 μm; 100% for particles
>0.75 μm (per JIS and ISO 21501-4)
1
Concentration Limits 9310/9510: 400,000 particle/ft
3
at 5% coincidence loss
9350/9550: 350,000 particle/ft
3
at 5% coincidence loss
9500: 200,000 particle/ft
3
at 5% coincidence loss
Light Source Long life laser diode
Zero Count Level
<1 count/5 minutes (meets JIS B9921 and
ISO 21501-4)
Flow Rate
9310/9510: 28.3 L/min (1.0 CFM) with ±5% accuracy
(meets JIS and ISO 21501-4)
9350/9550: 50 L/min (1.77 CFM) with ±5% accuracy
9500: 100 L/min (3.53 CFM) with ±5% accuracy
Flow Control Automatic
Calibration NIST traceable
Sample Probe/Tubing Isokinetic sampling probe
Sampling Modes
Manual, automatic, beep, cumulative/differential count,
or concentration
Sampling Time 1 second to 99 hours
Sampling Frequency 1 to 9999 cycles or continuous
Sample Output Internal HEPA filter
Vacuum Source
Internal pump with patented
*
flow control technology
Communication Mode Modbus
®
TCP over Ethernet (TCP/IP) or USB output
1
Meets all ISO 21501-4 specifications for ISO 14644-1 Class 3 and higher cleanrooms
*
Patent Number 6,167,107