VAT 670 Series User Manual

Series 670 DESCRIPTION OF PRODUCT
943070EA Edition 2018-06-19 5/
39
1.6 Technical data
1.6.1 Valve unit
Describtion
Symmetrical flow functional principle (given)
Pressure range at 20 °C
1 × 10E-9 mbar to 1.2 bar (abs)
Leak rate to outside at 20 °C
1 × 10E-8 mbar l/s
Leak rate valve seat at 20 °C
1 × 10E-4 mbar l/s
Max. differential pressure on plate at isolation
1200 mbar (from chamber side)
30 mbar (from pump side)
Max. differential pressure on plate during operation 10 mbar
Cycles (under vacuum) until first service
- Isolation cycles (open - closed - open)
- Throttling cycles (open - max. throttle - open)
200’000 (unheated and under clean conditions)
2’000’000 (unheated and under clean conditions)
Admissible operating temperature 10°C to +120°C
Mounting position Horizontal (actuators downwards)
Process side
materials
flange Aluminum EN AW-6061 T6 hard anodized
plate Aluminum EN AW-6061 T6 hard anodized
actuator shafts Stainless steel 316L (1.4435 or 1.4404)
bellows Stainless steel 633 (AM350)
bolts Stainless steel A2 (304)
wiper ring PEEK (polyether ether ketone)
Seals plate Viton ®
arm (plate)
Viton ®
shaft
Viton ®
actuator shaft seals
Viton ®
Max. controllable conductance (N
2
molecular flow) 22’000 l/s (max. 100 mm stroke)
Min. controllable conductance (N
2
molecular flow) 0.25 l/s
Actuating time full open to closed (throttling) typ. 1.0 s per 100mm
closed (throttling) to full open typ. 1.0 s per 100mm
full open to closed (isolated) typ. 1.0 s
closed (isolated) to full open typ. 1.0 s
Stroke
mechanical maximum 130 mm
Weight Approx. 38 kg
Dimensions Refer to dimensional drawing (934152)

VAT 670 Series Specifications

General

Brand	VAT
Model	670 Series
Category	Control Unit
Language	English