Models 5800-S
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
21
necessary, perform the zero adjustment procedure (section 3.2). If the output
signal does not zero properly, please contact Brooks Instrument.
2. Connect the instrument to a source of the same gas used for its original
calibration. Regulate the Set point to 100% flow and adjust the inlet and
outlet pressures to the calibration conditions. Verify that the output signal
reaches 5.00 volts and stabilises at that value. Vary the command voltage
over the 1 to 100% range and verify that the output signal follows the Set
point. If possible, connect a flow measurement device to monitor the actual
flow behaviour and verify the accuracy of the mass flow instrument. If the
mass flow instrument performs as described above then it is functioning
correctly and the problem may lie elsewhere.
Table 4-1 lists possible malfunctions which may be encountered during bench
troubleshooting.
For controller models only: Apply +5 to the +15 Vdc valve override pin (pin 12)
and verify that the output exceeds 100%. Connect the valve override pin to earth
and verify that the output signal falls below 2%.
Section 4: Maintenance
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