HYBRID Coater Service Manual ver1.1 Chapter 10
87
10.Spare Parts
The following spare parts are available for the HYBRID C.
HC-100/HC-200
Common Parts
Part No. Description
BM-3022 Gas spring
BM-9038 Exhaust hose
EL-00142 Fuse 5x20mm 2A-F
EL-00149 Fuse 5x20mm 2A-T
EL-00150 Fuse 5x20mm 5A-T
EL-00151 Fuse 5x20mm 6.3A-T
EL-00193 Lamp TL
EL-02527 Inductive proximity switch M8
EL-03076 Vibration isolator stepper motor
EL-04538 Power Supply 24V / 20 A
EL-04546 Power Supply 48V / 5 A
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