(xi)
7 Removal and Transportation................................................................................36
8 Troubleshooting ....................................................................................................38
8.1 Troubleshooting (1) Basic Trouble ............................................................38
8.2 Troubleshooting (2) ALARM .......................................................................39
8.3 Troubleshooting (3) TRIP............................................................................41
8.4 Troubleshooting (4) TRIP [Options] ...........................................................42
9 Inquiries .................................................................................................................43
9.1 North America ..............................................................................................43
9.2 Asia ...............................................................................................................44
9.3 Europe ..........................................................................................................45
Appendices
1. Material Safety Data Sheet – Vacuum Pump Oil.................................................I
2. Safety Interlocks ..............................................................................................III
3. Ebara Dry Pumps and SEMI S2-93A (S2-0200)................................................ V
4. Leak Check Procedure..................................................................................... VI
5. Returning pumps for Rebuild in U.S. ............................................................... VII
EBARA Corporation
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