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8 Troubleshooting
8.1 Troubleshooting (1) Basic Trouble
Abnormal symptom Check Item Corrective Action
Incorrect wiring Check wiring
Ground fault Replace or overhaul pump
Circuit breaker is activated.
(Leakage detector is on.)
Short circuit Replace or overhaul pump
No power supply to pump Check power supply
Connector is not connected Connect power connector
Power LED does not come
on.
ELB is not mode ON Switch ELB ON
ELB is not mode ON Switch ELB ON Nothing appears on LCD.
Display is abnormal.
Instruments are in failure Replace instruments
Mode is set in “Remote” Set switch to “Local” mode
Start-up conditions are not satisfied
(“STARTFAIL” is displayed)
Satisfy all start-up conditions
MP does not start when
pressing START button.
Instruments are in failure Replace instruments
Mode is set in “Local” Set switch to “Remote” mode
Mode is set in “Alternate”
(Pump jogs)
Apply “Alternate” start signal
Set to “Momentary” mode
MP does not start when
applying START signal.
Instruments are in failure Replace instruments
Leakage on vacuum piping Check piping
MP insufficient vacuum Replace or overhaul
BP start signal is not applied Apply BP start signal
BP does not start.
Instrument failure Replace instruments
Adjuster foot is not lowered Properly set all adjuster feet
Cover is in contact with other items Remove objects from cover
Cover screws loose Tighten mounting screws
Abnormal noise.
Excessive vibration.
Pump part is damaged Replace or overhaul pump
Byproducts settled in piping Clean up piping
N
2
pressure setting is high Set pressure for correct value
Leakage from vacuum piping Check piping
Vacuum pressure increase.
Byproducts settled in pump Replace or overhaul pump
WARNING
Interrupt Earth Leakage Breaker (ELB) or CB and lock out power
before starting on wiring and maintenance work.
Do not switch on the power supply to the pump until work is
completed.
WARNING
The pump casing and exhaust piping become extremely hot during
operation and for some time after stopping.
Keep pump and exhaust piping away from contact with personnel and
flammable substances.
Do not remove the pump cover during operation.
WARNING
Check for gas leaks after installing and maintaining the piping.
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air into
the pump
EBARA Corporation
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