EBARA A07V - Optional Trip Troubleshooting

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8.4 Troubleshooting (4) TRIP [Options]
Display Symptom Check Item Corrective Action
Tube fitting loose Tighten fittings TRIP:
WATER LEAKAGE
Water leakage
Instruments are in failure Replace instruments
Exhaust valve is closed Check exhaust piping TRIP:
BACK PRESS. HIGH
Exhaust pressure
rises.
(0.1 MPa)
Instruments are in failure Replace instruments
TRIP:
EMG. STOP SWITCH
Emergency stop
switch
Stop by emergency stop
button
Check that pump can be
operated and turn the
button head to reset
After taking corrective action, input RESET signal or push RESET button. The pump will
not RESET while the cause of the TRIP remains. In remote operation mode, interrupt
external START signal before resetting.
WARNING
Interrupt Earth Leakage Breaker (ELB) or CB and lock out power
before starting on wiring and maintenance work.
Do not switch on the power supply to the pump until work is
completed.
WARNING
The pump casing and exhaust piping become extremely hot during
operation and for some time after stopping.
Keep pump and exhaust piping away from contact with personnel and
flammable substances.
Do not remove the pump cover during operation.
WARNING
Check for gas leaks after installing and maintaining the piping.
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air into
the pump
EBARA Corporation