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5 Operation
WARNING
Following an Emergency Stop or TRIP (auto shut down), troubleshoot
the pump as described in Section 8 before restarting.
[NOTE]
These pumps are factory filled with lubrication oil.
5.1 Before Starting
Turn on the cooling water flow and check piping for water leaks.
CAUTION
Without sufficient cooling water, the pump temperature will rise,
which may cause rotor contact or other problems.
[NOTE] The pump unit has no cooling water valve.
Turn on the N
2
gas supply.
Check that the regulator attached to the pump is closed, i.e. the pressure adjustment knob is
fully counterclockwise. Open the main valve and check that there are no N
2
gas leaks from
the pipe connections.
Slowly turn the pressure adjustment knob clockwise to set the pressure (gauge pressure) to
0.05 MPa. Then press the red stopper to lock the knob in position.
WARNING
Supply N
2
gas to the exhaust piping when it is necessary to dilute
flammable or toxic gases down to safe concentration.
CAUTION
Set N
2
flow rate appropriately to avoid problems such as oil
carryover, corrosion inside the pump and deposition of byproducts.
Operate dilution N
2
selector valve, located on the side face of pump cover, in accord with the
dilution N
2
mode setting of dipswitch.
Dipswitch No. 7
ON OFF
Selector Valve
CLOSED OPEN
[NOTE]
N
2
gas flow requires several seconds to stabilize after opening valve.
[NOTE]
During regular operation, open dilution N
2
gas selector valve except
for processes that are non-corrosive and do not produce reaction
byproducts.
EBARA Corporation
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