(27)
Turn on power.
Turn on the ELB and ensure that the yellow LED (beside the dipswitches) lights. The LCD
controller counts down 10 seconds. Refer to Table 5.2 and Figure 5.1.
[NOTE] After turning on power, the instruments warm up for 10 seconds before the pump
will start.
Ensure cooling water flow is 3.5 L/min or more.
Readjust regulator so that dilution N
2
gas is within the range described below.
Table 5.1 Dilution N
2
gas flow
A70W 20-24 Pa m3/s
A30W 15-19 Pa m3/s
A25S 14-17 Pa m3/s
A10S 14-17 Pa m3/s
A07V 12-15 Pa m3/s
Then ensure that pressure gauge indicates 0.04-0.07 MPa.
After setting, push the red stopper of knob to lock.
Under this condition, shaft seal N
2
flow rate is 2.7-3.4 Pa m3/s. (Shaft seal N
2
flow rate is
not shown on LCD.)
Check that LCD displays no ALARM/TRIP signal.
The motor current is indicated as "00.0 A" on LCD.
When LCD indicates an ALARM/TRIP signal or an abnormal symptom appears, take
necessary measures in accordance with Section 8.
[NOTE] ALARM/TRIP signal persists until entry of a RESET signal even if the causes are
remedied.
After taking necessary measures, either press the RESET switch on the LCD
controller or input RESET signal through the control connector.
When buzzer is in use, pressing BUZZER OFF mutes the buzzer despite an
ALARM/TRIP condition.
Open the valve on the exhaust piping before starting the pump.
If the system has an exhaust gas scrubber, open its inlet and outlet valves.
CAUTION
Operating pump with these valves closed will pressurize the
exhaust and overload the pump.
EBARA Corporation
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