EBARA A07V - Alarm Condition Troubleshooting

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8.2 Troubleshooting (2) ALARM
Display Symptom Check Item Corrective Action
Coupler is disconnected Connect coupler
Pressure is not sufficient Apply sufficient pressure
Source valve is closed Open valve
Water piping is clogged Clean or replace piping
Water piping leaks Check the fittings
Instruments are in failure Replace instruments
ALARM: WATER
FLOW LOW ##.#
Water flow
decreases.
Inlet/Outlet is reverse
(Flow rate 0L/min)
Connect correctly
N
2
port is not connected Connect N
2
pipe fitting
Primary pressure is
insufficient
Apply sufficient pressure
Regulator setting low Increase pressure setting
N
2
piping is clogged Replace N
2
piping
N
2
piping leaks Check the fittings
Instruments are in failure Replace instruments
Selector valve is closed *1 Open the valve
Set to zero dilution mode”
ALARM: SEAL N2
FLOW LOW
ALARM: DIL. N2
FLOW LOW ##.#
[w/ dilution mode]
ALARM: DIL. N2.
VALVE OPEN
[w/o dilution mode]
Shaft seal. N
2
flow
decreases.
Dilution N
2
. flow
decreases.
*1
[w/ dilution mode]
Dilution N
2
valve
open.
*2
[w/o dilution mode]
Selector valve is open *2 Close the valve
Set to “standard mode”
Exhaust pressure rises Check exhaust piping
Rotor is in contact
(Byproducts)
(Substance plunge)
(Cooling water decrease)
(Gear or bearing damage)
Replace or overhaul pump
Replace or overhaul pump
Increase water slowly
Replace or overhaul pump
Instruments are in failure Replace instruments
ALARM: BP MOTOR
CURRENT HIGH##.#
ALARM: MP MOTOR
CURRENT HIGH##.#
BP motor current
rises.
MP motor current
rises.
Power supply failure Check power supply
Exhaust pressure rise Check exhaust piping
Duct ventilation is
insufficient
Ventilate sufficiently
Byproduct is clogged Replace or overhaul pump
ALARM: CASING
TEMP HIGH ##.#
Casing temperature
rises.
Cooling water decrease Increase water slowly
Decrease of oil Fill the lubricating oil
Insufficient sealing N
2
Check sealing N
2
ALARM
ALARM: BP-GEAR
OIL LEVEL LOW
ALARM: BP-MOTOR
BP gear side oil level
low
BP motor side oil
Pump is inclined Level the pump with
adjuster feet
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