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6.2 Piping Maintenance
WARNING
Purge system with sufficient N
2
gas before removing and cleaning the
vacuum lines and exhaust piping.
Prevent dispersal of flammable, toxic or dangerous materials and
guard against their contact with the human body.
Work only in locations with an emergency escape route.
WARNING
Check for gas leaks after installing and maintaining the piping.
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air into
the pump
CAUTION
Dispose of process byproducts in strict accord with all local and
national environmental and safety regulations.
Follow the instructions below when carrying out maintenance work on the vacuum and
exhaust piping of the pump.
Before you remove and wash the piping, purge with a sufficient volume of N
2
gas.
On systems with an exhaust gas scrubber, interrupt N
2
purge and close the inlet valve of the
scrubber before removing the piping.
Switch off the power supply.
After cleaning the piping, do not reconnect until it has dried completely.
6.3 Lubricant Oil
CAUTION
Do not start filling oil until the pump interior reaches atmospheric
pressure. During pump operation, the chamber containing the oil is
under vacuum. Removing the oil fill plug while the pump is running
will cause oil carryover and damage the pump.
CAUTION
A licensed industrial waste disposal dealer should dispose of waste
oil in accordance with Material Safety Data Sheet (Appendix 1).
Upon an OIL LEVEL LOW ALARM or whenever the lubricant oil needs replenishing, fill the oil
chamber and drain the oil that has collected in the secondary reservoir.
EBARA Corporation
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