EBARA A07V - Page 29

(15)
Check
Valve
Gas Inlet
Power
Motor Starter 1
Circuit Breaker
(ELB)
Gas Outlet
Seal N2 Gas Flow Sensor
FT1
Dilluting N2 Gas Flow Sensor
Selector Valve
Pressure Gauge
P
Regulator
Cooling Water Flow Sensor
FT3
Water
FT2
N2 Gas
Motor 1
Main Pump
(MP)
Booster Pump
(BP)
Connector
LCD Controller
Motor Starter 2
Motor 2
Control Circuit
[NOTE] A25S, A10S and A07V do not have a booster pump.
Figure 3.4 System Flow
EBARA Corporation