Edwards iTIM E73/A1/T1 - Page 26

D374-20-880 Issue E
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Serial Interface Operation
Table 9 - Parameters
{parameter} Description Measurement Unit
1
*
Pump control -
2 Electrical supply voltage 0.1V
3 Dry pump phase current 0.1A
4 Dry pump power 0.1kW
5 Voltage reading from dry pump thermistor 0.1mV
6 Imbalance in dry pump phase current 0.005%
7 Mechanical booster pump phase current 0.1A
8 Mechanical booster pump power 0.1kW
9 Voltage reading from mechanical booster pump thermistor 0.1mV
10 Imbalance in mechanical booster pump phase current 0.005%
11
*
Dry pump status -
12 Mechanical booster pump status
†
13 Gas module supply
†
14 Total running time hours
16 Hours on process hours
18 Process cycles -
20 Pumping system cycles -
21 Time to stop seconds
31
*
Gas module control -
32 Final stage purge nitrogen flow ml s
-1
35 Total nitrogen purge flows ml s
-1
39 Exhaust pressure 0.1kPa
40 Shaft-seals purge pressure 0.1kPa
45 Nitrogen supply status
†
46 Interstage purge status
†
47 Inlet purge status
†
48 Time for gas sensors to zero seconds
51
*
Sensor module control -
52 Analogue water flow 1ml s
-1
53 Active gauge pressure Pa or V
+
54 Mechanical booster pump motor temperature 0.1
o
K
55 Dry pump motor temperature 0.1
o
K
56 Exhaust temperature 0.1
o
K
57 Dry pump body temperature 0.1
o
K
58 Dry pump oil status
‡
59 Mechanical booster pump oil status
‡
60 Water flow status
‡
111
*
NIM (Network Interface Module) -
121
*
Parallel (tool) interface module -
131 Parallel (tool) interface input status Refer to Table 11