Edwards iTIM E73/A1/T1 - Page 25

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Serial Interface Operation
D374-20-880 Issue E
Table 8 - Query Messages
Query Message Name Message Syntax Short Reply Long Reply
Alarm status ?A{parameter}<CR> {priority level}
<CR><LF>
{priority level}, {alarm type}, {bitfield
status} <CR><LF>
Bitfield status ?B{parameter}<CR> {bitfield status}
<CR><LF>
{priority level}, {alarm type}, {bitfield
status} <CR><LF>
Control status ?C<CR> {on/off}<CR><LF> {on/off}<CR><LF>
Gas ballast status ?D<CR> {on/off}<CR><LF> {on/off}<CR><LF>
Format mode ?F<CR> {on/off}<CR><LF> {on/off}<CR><LF>
Gate valve status
†
?G<CR> {on/off}<CR><LF> {on/off}, {priority level}, {alarm
type}<CR><LF>
Information
*
*
In the long reply, the square brackets specify that the enclosed items may not appear in the reply message,
or may not appear a number of times. Refer to Section 5.3.7.
?I<CR> {number}<CR><LF> {number} [;{parameter}, {priority level},
{alarm type}, {bitfield status}]<CR><LF>
Load-lock pump
status
†
†
The replies to these query messages will have no meaning if the device (gate valve or load-lock pump) is not
controlled through an interface module.
?L<CR> {on/off}<CR><LF> {on/off}, {priority level}, {alarm
type}<CR><LF>
Nitrogen supply status ?N<CR> {on/off}<CR><LF> {on/off}<CR><LF>
On process status ?O<CR> {on/off}<CR><LF> {on/off}<CR><LF>
Pump status ?P<CR> {status
level}<CR><LF>
{status level}, {priority level}, {alarm
type}, {bitfield status}, {run til crash
status}, {on process status}, {control
object}<CR><LF>
Run til crash status ?R<CR> {on/off}<CR><LF> {on/off}<CR><LF>
Serial Number ?S<CR> {serial
number}<CR><LF>
{serial number}<CR><LF>
Pump node type ?T<CR> {node type}, {system type}, {dry pump},
{booster pump}, {u}, {u}, {u},
{u}<CR><LF>
Inlet purge status ?U<CR> {on/off}<CR><LF> {on/off}<CR><LF>
Value ?V{parameter}<CR> {value}<CR><LF> {value}, {priority level}, {alarm type},
{bitfield status} <CR><LF>