Inficon SKY CDG100D - 3 Technical Data

3 | Technical Data INFICON
3
|
Technical Data
Further technical data for gauges with serial interface
see respective Communication Protocol in the "Litera-
ture" chapter.
Measurement range
® "Validity""
Accuracy
1)
≤0.5 Torr/mbar (FS) 0.4% of reading
≥1 Torr/mbar (FS) 0.2% of reading
Temperature effect on zero
≤0.5 Torr/mbar (FS) 0.0050% FS/ °C
≥1 Torr/mbar (FS) 0.0025% FS/ °C
Temperature effect on span 0.02% of reading / °C
Resolution 0.003% FS
Gas type dependence none
Output signal analog
(measurement signal)
Measurement range 0 … +10 V
Voltage range –5 … +10.24 V (limited to
+10.24 V)
Voltage vs. pressure linear
Output impedance 0 Ω (short-circuit proof)
Loaded impedance >10 kΩ
Response time
2)
≥0.5Torr/mbar (FS) 30 ms
≤0.25Torr/mbar (FS) 130 ms / 30 ms
3)
1)
Non-linearity, hysteresis, repeatability in the calibrated range at 25 C
ambient operating temperature without temperature effects after 2 h
operation for gauges ≥1Torr/mbar (FS), and after 4h operation for
gauges <1Torr/mbar (FS).
2)
Increase 10 ... 90% FS.
3)
30 ms only for P control types.
10 tina52e1-h (2024-09)