Inficon SKY CDG100D - 4 Installation; Vacuum Connection

4 | Installation INFICON
4
|
Installation
WARNING
Fragile components
The ceramic sensor may be damaged by impacts.
· Do not drop the product and prevent shocks and impacts.
DANGER
Leaking process media
High-intensity mechanical, chemical or thermal impacts can
cause leaks in the measuring sensor. Process media can thus
leak and possibly cause hazards, if overpressure is in the vac-
uum system.
· Avoid high-intensity mechanical, chemical or thermal impacts
and overpressure in the vacuum system.
· Take appropriate measures (e.g. shut off gas supply, extrac-
tion, leak test) to avoid hazards or damage due to leaking
process media.
4.1
|
Vacuum Connection
DANGER
Overpressure in the vacuum system >1bar
Injury caused by released parts and harm caused by escaping
process gases can result if clamps are opened while the vacuum
system is pressurized.
· Do not open any clamps while the vacuum system is pressur-
ized. Use the type of clamps which are suited to overpres-
sure.
16 tina52e1-h (2024-09)