1 | General INFICON
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with D-Sub 15-pin connector
and DN 16 ISO-KF vacuum connection. They apply to the other
gauges by analogy.
We reserve the right to make technical changes without prior no-
tice.
1.3
|
Intended Use
The temperature controlled Capacitance Diaphragm Gauges of
the SKY
®
CDG100 series are intended for absolute pressure
measurement of gases in their respective pressure ranges.
The gauges belong to the SKY
®
Smart Sensors family and can
be operated in connection with an INFICON Vacuum Gauge
Controller (VGC series) or another appropriate controller.
1.4
|
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear out-
put signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 100°C which results in a
compensation of changes in the ambient conditions and a re-
duced deposition of process products and by-products in
process applications. An integrated baffle protects the sensor
against coating.
1.5
|
Trademarks
SKY
®
INFICON Holding AG
VCR
®
Swagelok Marketing Co.
6 tina52e1-h (2024-09)
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