Inficon SKY CDG100D - Page 13

INFICON Technical Data | 3
tina52e1-h (2024-09) 13
For longer cables, larger conductor cross-sections are required
(R
cable
≤1.0W).
Grounding concept → "Power Connection"
Materials exposed to vacuum ceramics (Al
2
O
3
≥99.5%),
stainless steel AISI 316L
Internal volume ≤6.8 cm
3
Leak rate <1×10
-9
mbar l/s
Admissible pressure (absolute)
200 … 1100 Torr/mbar (FS) 4 bar
1 … 100 Torr/mbar (FS) 2.6 bar
0.05 … 0.5 Torr/mbar (FS) 1.3 bar
Bursting pressure (absolute) 6 bar
Admissible temperature
Storage –40 °C … +65 °C
Operation +10 °C … +50 °C
Bakeout ≤110 °C at the flange
Relative humidity ≤80% at temperatures
≤+31 °C, decreasing to
50% at +40 °C
Use indoors only, altitude up to
2000 m NN
Pollution degree 2
Degree of protection IP40