K-Patents PR-23-GP - 5.4.3 Diagnostic values

5 Startup and use
35
Empty pipe Normal condions
Figure 5.8 Typical opcal images with IDS
Figure 5.9 A slope graph with IDS
              
                
5.4.3 Diagnosc values
            
− CONC          
 
− TEMP   
− CCD           
− nD      

  
− CALC         
 
− QF               
              

− LED                 
 
− HD TMP       
− HD HUM       
− I_SNS            