Installation
26 300324726_002_C0 - 10/2016 - © Leybold
In most applications the pump is flanged to the high-vacuum flange at the
apparatus. The pump can be mounted and operated in any desired attitude.
Use exclusively flange connecting components and fittings which have been
manufactured in accordance with DIN 28404 (ISO-K flange connections) or
ISO 3669 (CF flange connections).
Basically the frequency converter can be detached from the pump. However,
this must only be done by an expert trained by Leybold. For this consult with
us.
Mount the turbomolecular pump as close as possible to the vacuum
chamber. If the turbomolecular pump is permanently flanged to a vacuum
chamber with a weight exceeding 500 kg, it will not be necessary to secure it
in any other way.
High-vacuum flange
Cooling water IN
Service interface (RS 232)
Forevacuum flange
Interface
(Profibus drawn)
Mains connection
Cooling water OUT
Control connections for valves
Purge gas flange
Fig. 3.1 Connection fittings
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