Installation
31300324726_002_C0 - 10/2016 - © Leybold
To ensure that the forevacuum space at the turbomolecular pump is kept
largely free of oil vapors during operation, as well, we recommend installing
an adsorption trap in the forevacuum line. Alternatively purge the forevacuum
line with inert gas. In this case the pressure in the forevacuum line must be
over 10
-2
mbar.
Provide a roughing line to achieve the shortest cycle times.
Ensure that the pump is sufficiently isolated against vibrations generated by
the forevacuum pump.
No forces from the piping system may be allowed to affect the turbomolecu-
lar pump. Support the piping correspondingly or decouple through flexible
joints.
3.5 Connecting the cooling water
Screw on the cooling water lines, fastening torque 8 to 10 Nm.
Adjust the cooling water temperature so that the formation of condensate is
avoided.
Turn off the cooling water supply before venting the turbomolecular pump
and when it is not running in order to avoid condensate formation in the
pump.
The optional cooling water valve shuts off the cooling water flow when the
pump is not turning (n < 15 Hz) thereby preventing the formation of conden-
sate within the pump. Install the valve as depicted in fig. 3.7 and electrically
connect it to the frequency converter, see fig. 3.11.
Adsorption trap
Avoid condensate formation
Fig. 3.7 Cooling water connection
Cooling water OUT
Cooling water IN
Cooling water connections
at the rear of the pump
(without cooling water valve)
Electrical connec-
tion for the cooling
water valve
(optional)
Cooling water connections
Threads G1/8”
Cooling water connections
at the rear of the pump
with cooling water valve
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