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MAG integra Series
LEYBOLD MAG integra Series User Manual
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48
300324726_002_C0 - 10/2016 - © Leybold
EC
Declaration
of
Conformity
47
49
Table of Contents
Default Chapter
2
Table of Contents
2
Important Safety Information
5
Mechanical Hazards
5
Electrical Hazards
6
Hazards Caused by Materials and Substances
7
Thermal Hazards
7
Danger of Ignition
8
Risk of Damaging the Pump
9
1 Description
10
Design and Function
11
Supplied Equipment
12
Technical Data
13
Ordering Data
20
Accessories
21
2 Transport and Storing
22
3 Installation
23
Conforming Utilization
23
3.1.1 Non-Conforming Utilization
23
Operating Environment
25
Attach the Pump to the Vacuum Chamber
25
Forevacuum Connection
30
Connecting the Cooling Water
31
3.5.1 Water Quality
32
Connect the Purge Gas and Venting Valve
34
Electrical Connection for the Integrated Frequency Converter
35
Relays, Leds, PLC Interface
36
4 Operation
38
Media Compatibility / Purge Gas
38
Interfaces
38
Switching on
39
Operation
39
Switching off
40
Venting
41
Removing the Pump from the System
42
5 Maintenance
43
Cleaning
43
Changing the Touch-Down Bearings
44
Leybold Service
44
6 Troubleshooting
45
7 Waste Disposal
46
EC Incorporation Declaration
47
EC Declaration of Conformity
48
Certificates
49
4
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LEYBOLD MAG integra Series Specifications
General
Brand
LEYBOLD
Model
MAG integra Series
Category
Water Pump
Language
English
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