Operation
42 300324726_002_C0 - 10/2016 - © Leybold
Speed of the Pressure Rise
All turbomolecular pumps may be vented at full speed. However, the pres-
sure must not increase faster than specified through the pressure rise curve,
see Fig. 4.1.
The pump must be vented significantly slower when there is the risk of parti-
cles entering into the pump from the process. During venting, the flow must
be of the laminar type in both the vacuum chamber and the turbomolecular
pump.
The speed of the pressure rise during venting of the running pump will great ly
influence the load on the rotor/stator pack and the bearings. The slower the
pump is vented, the longer the service life of the bearings will be.
The pump must not be vented to pressures above atmospheric pressure.
4.7 Removing the pump from the system
Shut down the pump and vent as described in Sections 4.5 and 4.6.
If the pump has previously handled hazardous gases, implement the prop-
er precautionary measures before opening the intake or exhaust connec-
tion.
Observe Safety Informations 0.4.7.
Disconnect the pump only when it has come to a full stop. The green LED at
the frequency converter must have gone out.
Then switch the mains power off and wait until the yellow power LED is off.
Then only disconnect any cable connections.
Drain out the cooling water and blow out the cooling water lines so as to
avoid frost damage.
The pumps may be contaminated with process gases. These gases may be
toxic and hazardous to health. In addition, deposits with similarly dangerous
properties may have formed. Many of these gases and deposits form acids
when they come into contact with humid air. This will result in serious corro-
sion damage to the pump.
To avoid health hazards and corrosion damage when the pumps are
detached from the system, fasten a container of desiccant under the trans-
port cover of the high-vacuum connection and then close the pump immedi-
ately at all flange connections. Store the pump, with a desiccant, in an air-
tight PE bag.
Corrosion damage due to faulty packing will nullify the guarantee.
Pack the pump so that it cannot be damaged during shipping and storage.
Pay particular attention to protection for the flanges and the electrical plug.
Observe the instructions in Section 5.3 if you forward the pump to Leybold.
Speed
Pressure rise curve
Particles
DANGERDANGER
Drain cooling water
Hazardous gases
Deposits
Desiccant
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