Operation
39300324726_002_C0 - 10/2016 - © Leybold
4.3 Switching on
Switch on the backing pump.
Switch on the main switch. The Power ON LED will light green.
During an initialisation phase of approximately 45 seconds all LEDs at the fre-
quency converter will light up alternatingly, thereafter the yellow LED will
come on.
Switch on the turbomolecular pump
■
by pressing the START button (in the LOCAL mode)
■
via the interface, e.g. Profibus
The turbomolecular pump runs up. The green LED flashes. When the pump
reaches normal operation the green LED lights up permanently.
The backing pump and the MAG can be switched on simultaneously. In such
a situation the turbomolecular pump serves from the very outset as an effec-
tive baffle.
If the turbomolecular pump is to be switched on after a certain delay period,
pre-evacuation can take place through the turbomolecular pump even though
it is not running.
Do not open the turbomolecular pump suddenly to a previously evacuated
vacuum chamber or to a large-volume forevacuum line which has already
been evacuated. The pressure surge can press against the rotor into the
limiting bearing, causing accelerated wear at that bearing.
4.4 Operation
The magnetic bearing in the MAG are immune to wear. In addition to the
magnetic bearings, the MAG is equipped with touch-down bearings which
protect the rotor against mechanical contact with the stator if the pump is
subjected to external shock loading or when the pump is switched off. These
touch-down bearings have a limited service life. Please observe the following
in order to obtain maximum service life.
■
Avoid shock and vibrations (e.g. from other pumps) when the pump is run-
ning. Shocks are particularly harmful. If the pump appears to be running in
the mechanical bearings continuously it is switched off.
■
Avoid a frequent switching on and off.
■
Do not suddenly expose the MAG to an already evacuated vacuum cham-
ber. The pressure surge may cause the rotor to make contact with the
touch-down bearings. This will cause increased wear.
■
Do not stop the Mag with the mains. Use a stop command. Switching off
the mains while the pump is running will wear out the touch down bear-
ings. If the mains supply has been disconnected accidently re-connect it.
NOTICE
Protecting the
touch-down bearings
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