Installation
30 300324726_002_C0 - 10/2016 - © Leybold
3.4 Forevacuum connection
The high vacuum pressure level which can be achieved is a function of the
volume of gas flow Q to be pumped and the forevacuum pressure.
We recommend using our two stage TRIVAC-B pumps or dry compressing
pumps as backing pumps.
Connect the clean forevacuum line. The connecting flanges must be clean
and undamaged. The cross section of this line must be so wide that safe
opera tion of the pump can be ensured.
The forevacuum line must be tight. Hazardous gases can escape at leaks
or the gases being pumped can react with air or humidity.
Observe Safety Information 0.4.6.
Fig. 3.6 shows schematically the design of a pump sys tem incorporating a
turbomolecular pump turbomolecular pump and a TRIVAC backing pump
with integral anti-suckback valve.
When using a backing pump not having an integrated an ti-suckback valve, a
separate safety valve should be used. The safety valve keeps oil from back-
streaming from the backing pump and into the turbomolecular pump when
the system is not running.
Forevacuum pump
DANGER
Safety valve
Fig. 3.6 Layout of a turbomolecular pump system
1 Turbomolecular pump
2 Forevacuum gauge point
3 Backing pump
4 Anti-vibration bellows
5 Sorption trap
6 Forevacuum valve
7 Purge gas and venting valve
8 Isolation valve
9 Valve in the roughing line
10 Frequency converter
— — — — roughing line; recommended if
shorter cycle times are to be achieved
— · — · — · — · drive and control line
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