Safety Information
7300324726_002_C0 - 10/2016 - © Leybold
0.3 Thermal hazards
1 Handle the equipment only while vented and cooled down.
2 During operation of the pump certain areas can get so hot (80 °C
max.) so that there is the risk of suffering burns. Protect hot parts
against being touched.
3 Note the warning information on the housing surface. If these warning
notices have been removed, covered or obstructed, include corre-
sponding additional warning notices.
0.4 Hazards caused by materials and substances
1 The pump is not suited for pumping of reactive, corrosive or toxic
media. If the rotor is attacked by process gases, it can suffer destruc-
tion. Thus in the flange mounts high forces and torque conditions can
occur. The mounting screws for the pump may be torn off. When
using clamped flange connections at the housing or with components
above the housing, sudden twisting of the entire pump can be experi-
enced.
2 The operator of the system must ensure that no plasma is to enter the
pump. Otherwise it may lead to a failure of the pump.
3 When pumping dusty media, use a dust filter.
4 If low concentration corrosive or reactive gases are being pumped,
then operate the pump with purge gas.
5 Please consult us as to which types of pump are required for specific
processes and applications.
6 The forevacuum line must be tight. Hazardous gases can escape at
leaks or the gases being pumped can react with air or humidity.
A leak search will always be required after having installed the pump
and after service work on the vacuum.
Upon delivery the pump has an integral leak rate of < 5 · 10
-7
mbar·l/s.
7 If the pump has previously handled hazardous gases, implement the
proper precautionary measures before opening the intake or exhaust
connection.
Before opening the pump, purge it for a longer period of time with an
inert gas.
If necessary, use gloves, a respirator and/or protective clothing and
work under an exhaust hood. Firmly seal off the pump.
When shipping the contaminated pump for servicing, please also state
the type of hazard. For this you must use a form which we have pre-
pared for you.
8 Contaminated parts can be detrimental to health and environment.
Before beginning with any work, first find out whether any parts are
contaminated. Adhere to the relevant regulations and take the neces-
sary precautions when handling contaminated parts.
CAUTION
DANGER