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Installation

GA 05.139/1.02 - 06/99

Fig. 16 Layout of a turbomolecular pump system

Key to Fig. 16

1 Turbomolecular pump

2 Forevacuum gauge point

3 Backing pump

4 Anti-vibration bellows

5 Forevacuum valve

6 High vacuum valve

7 Purge gas connection

8 Valve in the roughing line

9 Electronic frequency converter

— — — — roughing line; recommended

if shorter cycle times are to be achieved

— · — · — · — · BEARING and DRIVE/TMS cable

LEYBOLD MAG W 2010 C User Manual

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