Micromeritics 3Flex User Manual

Gas Inlet Subsystem 3Flex Service Manual
2-16 Aug 2013
Pneumatic Valves and Manifold
The 3Flex uses pneumatically operated air valves. They are metal VCR diaphragm valves with Kel-F
seats and require 90-100 psi of house air to operate. The pneumatic valve actuator assembly is located
in the lower portion of the cabinet.
When the pneumatic valve actuator(s) receives a signal to open the valve(s), it sends air to the
appropriate valve(s).
Valve Actuators
From Actuator
To Valve
Enlarged view of
pneumatic assembly
Air supply

Micromeritics 3Flex Specifications

General

Brand	Micromeritics
Model	3Flex
Category	Measuring Instruments
Language	English