3Flex Service Manual Service Parts
Aug 2013 5-1
5. SERVICE PARTS
This section contains a list of repair parts.
Part Number Description
003/20656/05 Cable, M/F 15-pin 2.5 ft, straight
350/63815/00 Cable, RTD 1000 Ohms, 3 wire, 6P MMI, SS
350/63816/21 Cable, RTD, 1000 Ohms, 3 wire, 6P MMI, 21 in.
350/63816/30 Cable, RTD, 1000 Ohms, 3 wire, 6P MMI, 30 in.
350/63816/33 Cable, RTD, 1000 Ohms, 3 wire, 6P MMI, 33 in.
350/60820/00 Cable, Fan 24 VDC
350/63809/00 Cable, MKS transducer
248/60802/36 Cable, Servo Valve 0.030 SST
004/22601/06 Valve, Diaphragm-sealed, 1/4 in. Male
004/25040/05 Gasket, 1/4 VCR, SS, Retainer assembly
004/25040/06 Gasket, 1/2 VCR, SS, Retainer assembly
004/27070/00
Frit, 20
m, 1/4 VCR
260/25873/00 Plug, sample port (MS)
350/17705/011 PCB, Transducer ADC
350/17708/011 PCB, Power Distribution
350/17702/011 PCB, Valve and LED DRV-RS-232
350/17703/011 PCB, ADC Interface
350/17706/011 PCB, Mantle Interface
003/17642/011 PCB Assembly, CPU DSP-ISA
003/51150/00 Breaker, 2 pole 15 A
003/56139/00 Transformer, international dual, 115 V
511/60820/00 Fan assembly, 24 V
003/40065/01 Power supply, Quad universal
003/55630/01 Transducer, 0-15 psia, VCR-4 24.6 in.
003/55639/00 Transducer, 1000 Torr
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