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MKS 248A - Page 3

MKS 248A
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Copyright © 1996 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Cajon
®
and VCR
®
are registered trademarks of Cajon Company, Macedonia, OH
Kalrez
®
and Viton
®
are registered trademarks of E. I. DuPont de Nemours and Co. Inc.,
Wilmington, DE
Neoprene
®
is a registered trademark of Vibration, Mountings & Controls, Inc., Bloomingdale,
NJ
Swagelok
®
is a registered trademark of Crawford Fitting Company, Solon, OH

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