MKS T3B Series User Manual

13
Table 6: RS-232 Setup Messages (continued)
Description Command Request Response
Select Valve Type
(continued)
JT value
 (continued)
For T3B valves (continued):
value:
26 = 6” Direct Nonseal
27 = 6” Geared Fcup
28 = 6” Geared Nonseal
29 = 8” Direct Nonseal
30 = 8” Geared Fcup
31 = 8” Geared Nonseal
32 = 10” Direct Nonseal
33 = 10” Geared Fcup
34 = 10” Geared Nonseal
For T3P valves:
value: 0 = 4”*
1 = 6”
2 = 8”
3 = 10”
4 = 12”
5 = 14”
RJT
JT
value:
For T3P valves:
0
1
2
3
4
5
Pressure Control
Mode
V value
value:
1 = PID*
0 = Model Based
R51
V
value
value:
1 = PID
0 = Model Based
Pressure Units
F value
value: 00 = Torr*
01 = m
Torr
02 = mBar
03 = µBar
04 = kPa
05 = Pa
06 = cm H
2
O
07 = in H
2
O
R34
F value
value:
00 = Torr
01 = mTorr
02 = m
Bar
03 = µBar
04 = kPa
05 = Pa
06 = cm H
2
O
07 = in H
2
O
Backfill Valve
Control Enable
BE0 = Disabled*
BE1 = Enabled
RBE
BE0 = Disabled
BE1 = Enabled
* Initial setting
 = Indicates a factory only setting.
(continued on the next page)

MKS T3B Series Specifications

General

Brand	MKS
Model	T3B Series
Category	Control Unit
Language	English