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MKS T3B Series - Pressure and Valve Status

MKS T3B Series
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46
Reporting the Pressure Reading
To report the currently selected pressure reading as a percentage (%) of full scale (FS) of your pressure
sensor, issue the request:
R 5
The controller responds with the message [P value], where:
value: % of sensor full scale
Note
Pressure readings are reported as a percentage of full scale, where full scale is the sensor
range set with the [Ex value] command. Refer to Setting the Sensor Range, page 23, for more
information.
If the pressure is 10 Torr for a 10 Torr FS unit, an example response is:
P 100
The pressure reading is 100% of the sensor’s full scale.
If the pressure is 10 Torr for a 100 Torr FS unit, an example response is:
P 10
The pressure reading is 10% of the sensor’s full scale.
Calculating the Absolute Pressure
Calculate the absolute pressure using the formula:
A
BSOLUTE PRESSURE = (P value / 100) x (FULL SCALE)
For example, if the pressure reading (P value) for a 1000 Torr FS unit was reported as 65 (65%), the
absolute pressure is:
A
BSOLUTE PRESSURE = (65 / 100) x (1000)
= 650 Torr
Reporting the Valve Position Value
To report the valve position value as a percentage (%) of full Open, issue the request:
R 6
The controller responds with the message [V value], where:
value: % of full Open
For example, if the valve is at 50, the response is:
V+0050.0
The valve position is 50% of full open. R6 reflects the analog position output.
Reporting the System Status
The system status request reports the type of operation, the state of the LEARN function, and the state of the
valve control. To report the system status, issue the request:
R 37

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