Nanometrics Trillium Compact - Part 3 - Reference

Part 3 - Reference
l Specifications
l Performance
l Connectors and Cables
l Features and Dimensions
l Site Record
l Grounding guidelines
l Carrying Case
l Leveling Cradle and Spike Kit
l Open Source Attributions
l Glossary
Part 3 - Reference
16889R10 • 2020-11-12 Page 67