Nanometrics Trillium Compact - Chapter 12 - Features and Dimensions

Chapter 12 - Features and Dimensions
12.1 Trillium Compact - models TC120-SV1 and TC20-SV1
All dimensions are in millimeters unless otherwise stated.
Figure 12-1 - Top view
Chapter 12 - Features and Dimensions
16889R10 • 2020-11-12 Page 82