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3. Performing setup
3.1. Two axis servo system operation
This section describes the operation of two-axis Servo system that is set up in this Guide.
In this system, axis 0 and axis 1 are set up for an XY stage.
The mechanical configuration of axis 0 and axis 1 are as shown in the following table.
Item Axis 0 / Axis 1 mechanical configuration
Motor rated speed 3000 r/min
Ball screw pitch 10 mm
Encoder resolution 23 bits/rotation (8,338,608)
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