BG 5171 BEN / B (2017-02) PBR 260.oi 9
3 Installation
DANGER
DANGER: overpressure in the vacuum system > 100 kPa
If clamps are opened incorrectly or inadvertently, injury can be caused
by catapulted parts and your health can get damaged by leaking pro-
cess media.
Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which cannot be opened inadvertently (e.g. hose
clip clamping rings).
DANGER
DANGER: hazardous voltages
Incorrectly grounded products can be extremely hazardous in the
event of a fault.
The gauge must be electrically connected to the grounded vacuum
chamber. This connection must conform to the requirements of a
protective connection according to EN 61010:
• CF flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive metallic clamping
ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
• The gauge should be mounted so that no vibrations occur.
• The gauge may be mounted in any direction. However, no particles and con-
densates should penetrate into the measuring chamber.
• Take appropriate measures to prevent overheating (
→ Technical data for
admissible operating temperature).
• The sensor can be baked out at up to 150 °C. For temperatures above 50 °C
the electronics unit must be removed (→ 10) or an extension (Option → 26)
must be mounted (→ 12).
• See dimensional drawings ( 7) for space requirements.
• If the flange connection can only be made without the electronics unit, remove
the electronics unit (→ 10).
• We recommend using a metal sealing (ultra sealing ring → 26) as vacuum
flange sealing because elastomer seals (Vitilan, FPM) can impair the meas-
urement accuracy already in the 10
-6
hPa range through gas desorption.
• The gauge is supplied with a built in grid. For potentially severely contaminating
applications and to protect the electrodes against light and fast particles
installation of the optional baffle (→ 26) is recommended (→ 22).
3.1 Vacuum Connection
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