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3

© 2015 TOSHIBA TEC CORPORATION All rights reserved e-STUDIO2008A/2508A/3008A/3508A/4508A/5008A

OUTLINE OF THE MACHINE

3 - 9

35ppm/45ppm/50ppm

Fig. 3-8

S17

CLT1

M10

M13

SW5

S7

S6

M9

S18

SOL1

S16

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