Ulvac DPG-30R - Overview; Introduction; Features

DC Power Supply [DPG-30R & DPG-MC60R, DPG-MC120R, DPG-MC240R]
2. Overview
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2. Overview
This chapter describes the system's features, configuration, and specifications.
2-1. Introduction
This power supply was designed as a DC power supply for 30 kW output sputtering.
It can be used as a 30 kW to 60 kW output power supply system by connecting it to the DPG-MC60R
controller, and it can be used as a 30 kW to 120 kW output power supply system by connecting it to the
DPG-MC120R controller, and it can be used as a 30 kW to 240 kW output power supply system by
connecting it to the DPG-MC240R controller. The rated power can be supplied to the load by optimizing
the load impedance of the plasma. This system has an external control terminal (AD-IF) on the controller
and it operates by external control via a programmable logic controller (PLC).
2-2. Features
 A single controller can control up to 2 power supplies (DPG-30R) by using the DPG-MC60R controller
 A single controller can control up to 4 power supplies (DPG-30R) by using the DPG-MC120R controller
 A single controller can control up to 8 power supplies (DPG-30R) by using the DPG-MC240R controller
 Implements simple circuitry for increased reliability.
 The DC power supply's output can be monitored by the controller.
 Abnormalities in each power supply can be displaied by a single controller.
 Designed taking into consideration the distinctive noise of a large system.
 Air-cooled, does not require cooling water.
 Low arc energy circuit equipped as standard.
 Supports a wide range of input from 380 to 480 ±10% VAC.