Ulvac DPG-30R - 120 Kw Power Supply System Configuration Example

DC Power Supply [DPG-30R & DPG-MC60R, DPG-MC120R, DPG-MC240R]
2. Overview
5
2-3-2. 120 kW power supply system configuration example
* The DC power supply input terminal and output terminal are both located on the back of the power
supply.
DC Power Supply
DC Power Supply
3Φ+GND
380-480 VAC
DC Power Supply
DC PS controller
DPG-MC120R
AD I/F
Vacuum chamber
Cathode
2Φ+GND
100-240 VAC
+
-
DC Power Supply
+
-
Input
+
-
+
-
Output
Input
Input
Anode
3Φ+GND
380-480 VAC
3Φ+GND
380-480 VAC
3Φ+GND
380-480 VAC
Input
Input
Output
Output
Output
Figure 2-2 120 kW power supply system