Ulvac DPG-30R - 240 Kw Power Supply System Configuration Example

DC Power Supply [DPG-30R & DPG-MC60R, DPG-MC120R, DPG-MC240R]
2. Overview
6
2-3-3. 240 kW power supply system configuration example
DC Power Supply
DC Power Supply
DC Power Supply
DC Power Supply
DC Power Supply
DC Power Supply
DC Power Supply
DC Power Supply
DC PS Controller
DPG-MC240R
AD I/F
Vacuum chamber
Cathode
1Φ+GND
100-240 VAC
+
-
Output
Input
+
-
Output
Input
+
-
Output
Input
+
-
Output
Input
Input
Anode
+
-
Output
Input
+
-
Output
Input
+
-
Output
Input
+
-
Output
Input
Anode
3Φ+GND
380-480 VAC
3Φ+GND
380-480 VAC
3Φ+GND
380-480 VAC
3Φ+GND
380-480 VAC
3Φ+GND
380-480 VAC
3Φ+GND
380-480 VAC
3Φ+GND
380-480 VAC
3Φ+GND
380-480 VAC
Figure 2-3 240 kW power supply system