VAT 642 Series - Connection Overview; Installation Procedure

Series 642 INSTALLATION
742280ED Edition 2017-11-24 17/
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4.2.2 Connection overview
System:
1 Valve
2 Pressure sensor(s)
3 Sensor cable(s)
4 Cable to RS232
remote control unit
5 Cable to power supply
6 Link cable
Actuator Controller
4.2.3 Installation procedure
1. Install valve [1] into the vacuum system, with valve seat side to process chamber. The valve seat side
is indicated by the symbol "∆" on the valve flange.
Master Slave
[6] Link cable
[6] Link to next Slave