VAT 65040 Series

Installation, Operating & Maintenance Instructions
Series 650, DN 100 – 250 (I.D. 4" - 10")
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email reception@vat.ch www.vatvalve.com
258550EE
2007-05-11
24/51
Gasflow calculation for LEARN:
Do not apply a different gasflow for learn than determined below. Otherwise pressure control
performance may be insufficient.
Choose the applicable formula depending on units you are familiar with.
p
SFS
• C
min
q
L
=
20
00
q
L
gasflow for learn [Pa m
3
/s]
p
SFS
sensor full scale pressure [Pa]
C
min
min. controllable conductance of valve [l/s]
(refer to «1.1 Technical data»)
p
SFS
• C
min
q
L
=
2
q
L
gasflow for learn [mbar l/s]
p
SFS
sensor full scale pressure [mbar]
C
min
min. controllable conductance of valve [l/s]
(refer to «1.1 Technical data»)
q
L
= 39.4 • p
SFS
• C
min
q
L
gasflow for learn [sccm]
p
SFS
sensor full scale pressure [Torr]
C
min
min. controllable conductance of valve [l/s]
(refer to «1.1 Technical data»)