MAINTENANCE Series
24/39
Edition 2018-06-19 943070EA
Description
Required tool
25. Select [CLOSE], the valve is
executing Homing and moves to
close position.
CPA
26. Close the service cover. Refer to
manual of customized process
chamber.
27. Connect the heater cables.
28. Switch ON the power supply of
heating device.
29. Valve is ready for use.
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