1-4
Chapter 1. INTRODUCTION
Model selection guide
Basic
model
No.
Control
flow
range
Dis-
play
Mate-
rial
Connec-
tion
Gas
type
No
use
Option
1
Option
2
Option
3
Option
4
Code Description
MPC Panel mount mass flow controller
9500 0.020 to 0.500 L/min(standard) *
1
0002 0.08 to 2.00 L/min(standard) *
1
0005 0.10 to 5.00 L/min(standard) *
1
0020 0.4 to 20.0 L/min(standard) *
1
B Model with integrated display
B Brass
R Rc1/8
N Air/Nitrogen *
2
0 -
0 None
1
With analog input/output function
(without RS-485 communication
function)
2
With RS-485 communication
function
(without analog input/output
function)
0 Without optional function
0 Without optional function
0 Without optional function
D Inspection certificate
Y Traceability certification
0 Product version
*1 L/min(standard) indicates the volume flowrate per minute (L/min) converted to 20 °C, and 101.325 kPa (1 atm).
The reference temperature can also be changed to 0 °C, 25 °C and 35 °C.
*2 The Air/Nitrogen is set as a factory setting.
The MPC can be used for argon and carbon dioxide (CO
2
) by setup change.